The Germany international missed Arsenal’s 1-0 win at Burnley on Sunday due to illness but returned to play the full 90 minutes at The Emirates.
Alexandre Lacazette netted the opener in the third minute, before substitute Olivier Giroud made it 2-0 in the second half.
Alexis Sanchez then added a third, before Ozil netted his first of the night, and Giroud then made it 5-0 to cap a dominant victory.
And speaking to BBC Sport after the game, Ramsey said: “Mesut Ozil was ill for the Burnley game but his batteries were recharged and he was fantastic tonight.”
On the performance overall, he added: “Full credit to Huddersfield, they made it difficult for us to break them down. We upped the tempo in the second half and were more clinical.”
The win left Arsenal in fourth place in the Premier League table and 12 points behind leaders Manchester City.
The Gunners now turn their attentions towards their crunch Premier League clash against Manchester United at The Emirates on Saturday afternoon.
The north London side, who finished fifth and won the FA Cup last term, will be hoping for a repeat of their 2-0 victory over Jose Mourinho’s men in the same fixture in north London last season.
Arsenal have not won the Premier League since their famous unbeaten triumph in the 2003-04 campaign.
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